Change of Headquarters

The NovioMEMS headquarters has moved to another building:

      Fontys S2, room 3.49

      Den Dolech 2, 5612 AZ  Eindhoven.

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Multi-Project wafers runs 2012
It is possible to join multi-project wafer runs (MPW) with thin film PZT and membranes. For information, please contact NovioMEMS by e-mail.
NovioMEMS is open to proposals from customers for other industrial implementation of technologies.

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December 2011:
Project on Ultrasound MEMS technology granted
The Innovation to Industrialisation for Advanced Micro- and Nanosystems (I2I) project has been granted for subsidies from EFRO. Part of the I2I project comprises the project Ultrasound MEMS technology, with SolMateS, Solutions-on-Silicon, University Twente as partners and lead by NovioMEMS. Based on the thin film piezo-electric technology of SolMateS an industrial process flow will be developed with NovioMEMS. The university Twente offers expertise and Solutions-on-Silicon BV is the consultant for the design of cleanroom equipment, as they build on extensive expertise in re-furbishment, trade and maintenance of cleanroom equipment.
The I2I project has been submitted by Business Cluster Semiconductors East-Netherlands (BCS) and will run three years, starting January 2012. Other projects in I2I are:

- Breath Analyzer based on Micro Gas Chromography
- Micro Inhaler for drug delivery
- Multiple Diagnose Cartridge based on Microfluids and IC-technology for point-of care/Lab-on-Chip
- Body Fluid Sampler
- Thin-Film Lift-Off process for re-use of substrates. NovioMEMS also participates as a partner in this project

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September 2011:
ICP granted, ranked no.1 in Netherlands
The Innovatie Prestatie Contract (IPC) as submitted by the Eindhoven University Business Club (EUBC) has been ranked highest out of originally 83 proposals. This project of 15 small companies, mostly connected to the Eindhoven University of Technology, focus on improvement of the innovation process. NovioMEMS and ALSI from Beuningen jointly started the development of dust-free laser dicing of MEMS wafers into separate chips in September 2011. The IPC will run for three years.

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September 2011:
Project “MST for SME” completed in 2011
On request of the Materials Innovation institute M2i, a knowledge transfer project “MST for SME” has been completed in 2011. For five customers NovioMEMS performed feasibility studies. These studies involved optical quality of layers for optical microsystems, micro-filters for bacteria, economic feasibility of GaAs solar cell systems for Concentrated PhotoVoltaic (CPV) application, feasibility for the industrial manufacturing of nozzle chips based on thin membranes, and possible MEMS devices for use with PZT thin film.
As a result, all investigations appear to be feasible and performance on some chip has improved by the industrial processing, though for 0.5um features extra processing steps are necessary. This will be addressed in 2012.